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Turbo-Pumped Sputter Coater
- 분류
- 예약가능여부
- 불가능
- 담당부서
- 장비표준분류
- 취득방법
- 1
세부정보
| 모델명 | Q150T | 제작사 | Quorum TECHNILOGIES |
|---|---|---|---|
| 제작국가 | 영국 | ||
| 구성 및 성능 |
Turbo-molecular pump : Internally-mounted, 70 l/sec. air-cooled turbo-molecular pump Rotary pump : 50 l/min. two-stage rotary pump with oil mist filter (order separately, see AG-DS102) Vacuum measurement : Pirani gauge as standard. A full range gauge (10428) is available as an option Typical ultimate vacuum : 5x10-5 mbar Sputter vacuum range : Between 5x10-3 and 5x10-1 mbar Specimen stage : 50 mm Ø rotation stage. Rotation speed 8-20 RPM. For alternative stages see options and Aaccessories Sputtering : 0150 mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without ‘breaking’ vacuum and with built in rest periods) Carbon evaporation : A robust, ripple free DC power supply featuring pulse evaporation or ensures reproducible carbon evaporation from rod or fibre sources. Current pulse: 190 A Metal evaporation and aperture cleaning insert (option) : For thermal evaporation of metals from filaments or boats. For cleaning SEM or TEM apertures a standard molybdenum boat (supplied) can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times: up to four minutes |
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| 사용 예 | 스퍼터 코터, 카본 코터, 글로우 방전용으로 주로 사용 | ||
| 장비 설명 | SEM, TEM 및 박막 기술을 위한 미세 입자 탄소 필름 적용을 위한 자동화 모듈식 스퍼터 코팅 시스템 | ||
| 사용료 (1h기준, 원) |
22,000원 | ||
| 설치장소 | RIC관 106호 | ||
담당자정보
| 장비담당자 성명 | 한정수 | 휴대폰번호 | |
|---|---|---|---|
| 이메일 | rbc3716@hoseo.edu | ||
